Midas?气体侦测器传感器型号:Gas Name Chemical Formula Range Sensor Part NumberAmmonia NH3 9-100 ppm MIDAS-E-NH3Arsine AsH3 18-200 ppb MIDAS-E-ASHBoron Trichloride BCl3 0.72-8 ppm MIDAS-E-HCLBoron Trifluoride BF3 0.72-8 ppm MIDAS-E-HFXBoron Trifluoride (Low Level) BF3 0.18-2 ppm MIDAS-E-HFLBromine Br2 0.036-0.4 ppm MIDAS-E-BR2Carbon Dioxide CO2 0.15-2.0% MIDAS-E-CO2Carbon Monoxide CO 9-100 ppm MIDAS-E-COXChlorine Cl2 0.18-2 ppm MIDAS-E-HALChlorine Dioxide ClO2 0.036-0.4 ppm MIDAS-E-BR2Diborane B2H6 36-400 ppb MIDAS-E-B2HDichlorosilane H2Cl2Si 0.72-8 ppm MIDAS-E-HCLDifluoromethane** CH2F2 16-240 ppm MIDAS-E-XCFDisilane Si2H6 1.8-20 ppm MIDAS-E-SHXFluorine F2 0.36-4 ppm MIDAS-E-HALGermane GeH4 70-800 ppb MIDAS-E-ASHHexafluorobutadiene** C4F6 3-40 ppm MIDAS-E-CFXHydrogen (%LEL) H2 6.5-**** LEL MIDAS-E-LEL*Hydrogen (ppm) H2 90-1000 ppm MIDAS-E-H2XHydrogen Bromide HBr 0.72-8 ppm MIDAS-E-HCLHydrogen Chloride HCl 0.72-8 ppm MIDAS-E-HCLHydrogen Cyanide HCN 1.8-20 ppm MIDAS-E-HCNHydrogen Fluoride HF 1.05-12 ppm MIDAS-E-HFXHydrogen Fluoride (Low Level) HFL 0.18-2 ppm MIDAS-E-HFLHydrogen Sulfide H2S 3.6-40 ppm MIDAS-E-H2SMethane (%LEL) CH4 6.5-**** LEL MIDAS-E-LEL*Methyl Fluoride** CH3F 8-120 ppm MIDAS-E-XHFNitric Oxide NO 9-100 ppm MIDAS-E-NOXNitrogen Dioxide NO2 1.05-12 ppm MIDAS-E-NO2Nitrogen Trifluoride** NF3 3.6-40 ppm MIDAS-E-HFX for 00P, XHF for NP1Octofluorocyclopentene** C5F8 3-40 ppm MIDAS-E-XCFOxygen O2 0.2-25% v/v MIDAS-E-O2XOzone O3 0.065-0.7 ppm MIDAS-E-O3HOzone (Low Level) O3 0.036-0.4 ppm MIDAS-E-O3XPhosphine PH3 110-1200 ppb MIDAS-E-PH3Silane SiH4 1.8-20 ppm MIDAS-E-SHXSilane (Low Level) SiH4 0.18-2 ppm MIDAS-E-SHLSulfur Dioxide SO2 0.7-8 ppm MIDAS-E-SO2Tetra Ethyl Ortho Silicate TEOS 3.6-40 ppm MIDAS-E-TEOTungsten Hexafluoride WF6 1.05-12 ppm MIDAS-E-HFXTungsten Hexafluoride (Low Level) WF6 0.18-2 ppm MIDAS-E-HFL